发明名称 |
MICRODEVICE FOR SENSING A FORCE |
摘要 |
A microsensor or micromechanical device based upon the piezoelectric properties of thin film lead zirconate titanate (PZT) with a thickness of between 0.1 and 5 microns. The thin film PZT is sandwiched between first and second electrodes which are provided with electrical connection means for electrically connecting the electrodes to a voltage sensor or voltage source. The invention also relates to a method for making such microsensor or micromechanical device.
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申请公布号 |
US5209119(A) |
申请公布日期 |
1993.05.11 |
申请号 |
US19900626712 |
申请日期 |
1990.12.12 |
申请人 |
REGENTS OF THE UNIVERSITY OF MINNESOTA |
发明人 |
POLLA, DENNIS L.;TAMAGAWA, TAKASHI |
分类号 |
G01L9/08;G01L1/16;G01L9/00;H01L41/24 |
主分类号 |
G01L9/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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