摘要 |
PURPOSE:To effectively prevent the reflection of input/output signals of a semiconductor element, regardless of variation in insulating body temperature, by externally adding a specific insulator powder to a metal powder composed of tungsten powder and rhenium powder to form a resistance material. CONSTITUTION:Between a metallized wiring layer 5a for signaling and a metallized wiring layer 5b for grounding on an insulating body 1, formed a terminating resistor to reduce noise accompanying input/output signals of a semiconductor element 4. The resistance material composing this terminating resistor is obtained by externally adding an insulator powder of 10-100wt.% to a metal powder composed of tungsten powder of 10-60wt% and rhenium powder of 40-90wt% and sintering the resultant powder. The sintered compact is of a low temperature coefficient of resistance and its resistance is hardly caused to change by variation in temperature. Consequently, it effectively prevents the reflection of input/output signals of the semiconductor element 4, regardless of temperature of the insulating body 1.
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