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发明名称
TITANIUM TUNGSTEN TARGET MATERIAL FOR SPUTTERING AND MANUFACTURING METHOD THEREFOR
摘要
申请公布号
KR930003516(B1)
申请公布日期
1993.05.01
申请号
KR19910009790
申请日期
1991.06.14
申请人
HITACHI METALS LTD.
发明人
HIRAKI, AKITOSHI
分类号
C23C14/06;(IPC1-7):C23C14/06
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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