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发明名称
WORK CONVEYOR
摘要
申请公布号
JPH05109861(A)
申请公布日期
1993.04.30
申请号
JP19910270708
申请日期
1991.10.18
申请人
HITACHI LTD
发明人
TANAKA KATSUHISA;SUZUKI TAKAMICHI;ODAJIMA HITOSHI;SAKATA TOMOAKI;URA KAZUHIRO;YONEDA TATSUYA
分类号
H01L21/677;H01L21/68
主分类号
H01L21/677
代理机构
代理人
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