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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05109900(A)
申请公布日期
1993.04.30
申请号
JP19910265829
申请日期
1991.10.15
申请人
NEC CORP
发明人
SHINOHARA MASAHIDE
分类号
H01L21/768
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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