SEMICONDUCTOR DEVICE WITH MULTILAYER INTERCONNECTION STRUCTURE AND ITS PRODUCTION,申请号JP19910271151-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE WITH MULTILAYER INTERCONNECTION STRUCTURE AND ITS PRODUCTION
摘要
申请公布号	JPH05109901(A)	申请公布日期	1993.04.30
申请号	JP19910271151	申请日期	1991.10.18
申请人	SEIKO EPSON CORP	发明人	YOKOYAMA KENJI
分类号	H01L21/768	主分类号	H01L21/768
代理机构		代理人
主权项
地址

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