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发明名称
摘要
申请公布号
JPH0528896(B2)
申请公布日期
1993.04.27
申请号
JP19860127200
申请日期
1986.06.03
申请人
OKI ELECTRIC IND CO LTD
发明人
SUMYA MASANORI;MATSURA HAJIME;EGAWA TAKASHI;YAMAMOTO SHINSUKE
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
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