发明名称 PHOTOSENSITIVE COMPOSITION
摘要 PURPOSE:To obtain a clear positive image by incorporating a specified vinyl ether compd. and a compd. which generates an acid under light into an alkali- soluble polymer such as acrylic resin. CONSTITUTION:A vinyl ether compd. represented by formula I or II and a compd. which generates an acid when decomposed by irradiation with active rays of light or radiation are incorporated into an alkali-soluble polymer such as acrylic resin. In the formulae I, II, each of R<1> and R<2> is a residue of polyhydric alcohol or a residue of polyhydric phenol, R<3> is 1-10C straight chain or branched alkylene, (n) is 0 or 1 and (m) is an integer of 2-6. A positive type photosensitive compsn. having high sensitivity to UV, visible light, electron beams or X-rays is obtd. and a clear positive image can be obtd.
申请公布号 JPH05100429(A) 申请公布日期 1993.04.23
申请号 JP19910259433 申请日期 1991.10.07
申请人 FUJI PHOTO FILM CO LTD 发明人 KONDO SHUNICHI;UMEHARA AKIRA;AOTANI NORIMASA;YAMAOKA TSUGIO
分类号 G03F7/029;G03F7/004;G03F7/039;H01L21/027;H01L21/30 主分类号 G03F7/029
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