发明名称 MANUFACTURE OF PHOTOELECTRON SEMICONDUCTOR DEVICE
摘要 PURPOSE: To reduce the manufacturing stages of a device by manufacturing at least one semiconductor quantum that is followed by the mutual diffusion of the barrier of a quantum well. CONSTITUTION: An n-type layer 2 of GaInP, a lamination layer 3 of GaAs/GaInP superlattice, and a layer 4 of GaInP, and a layer 5 of GaAs are manufactured on a substrate 1 by epitaxy. A deposition 6 of silica is formed on the upper surface of a layer that has been grown epitaxially. Then, a window 7 is opened optically or by electronic masking. Then, zinc is diffused by the window 7 via silica mask, thus prescribing the active zone of a constituent to be obtained. The diffusion of zinc forms the mutual diffusion of group III elements in an interface between GaInP barrier and GaAs quantum well, thus the manufacturing stages of a device can be reduced.
申请公布号 JPH05102611(A) 申请公布日期 1993.04.23
申请号 JP19920090993 申请日期 1992.04.10
申请人 THOMSON CSF 发明人 BOODOWAN DOU KUREMUU;MANIIJIYU RAZUGII
分类号 H01S5/00;H01L21/18;H01L31/0352;H01L33/00;H01L33/06;H01S5/042;H01S5/183;H01S5/34;H01S5/343 主分类号 H01S5/00
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