| 摘要 |
PURPOSE:To largely improve joint strength of an interface between solid electrolyte and an electrode, largely improve electric characteristics of a thin film gas sensor such as sensitivity and response and its reliability such as long life property, and prevent metal from losing the characteristics of the solid electrolyte and the electrode. CONSTITUTION:To manufacture a thin film gas sensor, a base solid electrolyte layer comprising 0.05 to 5.0wt.% of trivalent or lower metal added and a base electrode layer comprising 0.05 to 5.0wt.% of trivalent or lower metal added are laminated, and the obtained laminate body is baked in an oxidizing atmosphere. The metal contains at least one selected among copper (Cu), bismuth (Bi), zinc (Zn) and cadmium (Cd). |
