FOREIGN MATTER DETECTING DEVICE

摘要

PURPOSE:To provide the foreign matter detecting device which can surely detect the foreign matter in a reticule. CONSTITUTION:This device is so constituted that the detection of the foreign matter can be executed at a high speed with high accuracy by combining a polarization laser 22 and transmission illumination 23, combining the polarization laser 22 and an analyzer 16 and negating the pattern edges affected in the polarization laser 22 and the analyzer 16 by the transmission illumination 23.