| 摘要 |
PURPOSE: To provide a simple preionization device of a gas pulse laser that can perform high-quality ionization with less expensive structures and circuits. CONSTITUTION: A preionization device of a gas pulse laser includes corona preionization electrodes 12 and 12', and the preionization electrodes are arranged near main electrodes 10 and 10', respectively. To reduce the cost for structures and circuits and to perform preionization effectively, the preionization electrodes 12 and 12' are set to the voltage of a high-voltage power supply 16 for supplying a voltage to the main electrodes 10 and 10'. A time delay between the excitation of the preionization electrode and the trigger of a main discharge between the main electrodes 10 and 10' is set by an inductance 30. |
