POLISHING AND GRINDING DEVICE FOR DISK-LIKE WORK

摘要

PURPOSE: To bring a device into contact with moving disc-shaped workpieces for polishing or grinding and to easily release the machined workpieces. CONSTITUTION: Through holes 34 formed in the flat grinding surfaces 24 of a plurality of grinding wheels 14 supported by a manifold spacer 12 are communicated with fluid inlets 42 formed in the spacer 12. The grinding wheels 14 are mounted on the bottom floor 22 of the manifold spacer 12 so that orifices 52 formed in the manifold spacer 12 are communicated with the through holes 34. Pressure air introduced from the fluid inlets 42 is allowed to escape from the through holes 34 as excessive pressure drop is prevented by the orifices 52, to forcibly remove workpieces adhering to the grinding wheels 14.