| 摘要 |
PURPOSE:To increase an output from a discharge excitation laser device and improve efficiency thereof and augment repetition thereof by strongly conducting preionization and increasing the number of the electrons of preionization. CONSTITUTION:A discharge excitation laser device is composed of two main electrodes 1, 2, in which one main electrode is constituted of an open electrode, a dielectric 3 disposed so as to be fast stuck onto a surface of the reverse side to the other main electrode 1 in the open electrode 2, a third electrode 4 oppositely faced to the open electrode while holding the dielectric and arranged so as to be closely attached to the dielectric, a capacitor 5 for excitation connected in parallel with the two main electrodes and the dielectric and a high-voltage pulse initiator 6 for charging the capacitor for excitation. Conductors 9 fast stuck to the dielectric are disposed to sections except the adhesive surfaces of the dielectric and the opening electrode and conductors 10 closely attached to the dielectric to sections except the adhesive surfaces of the dielectric and the third electrode, and the conductors arranged on the opening electrode side are connected to the opening electrode and the conductors disposed on the third electrode side to the third electrode. |
