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发明名称
METHOD AND DEVICE FOR MEASURING PLASMA DENSITY DISTRIBUTION
摘要
申请公布号
JPH0589996(A)
申请公布日期
1993.04.09
申请号
JP19910249809
申请日期
1991.09.27
申请人
TOSHIBA CORP
发明人
SAKAI TAKAYUKI
分类号
G01N21/62;H05H1/00
主分类号
G01N21/62
代理机构
代理人
主权项
地址
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