摘要 |
<p>A field-emission electronic device works as a field-emission electron source. The field-emission electronic device comprises an anode electrode (3), a first insulating member (5) disposed on the anode electrode, a cathode electrode (1) disposed on the first insulating member, a second insulating member (6) disposed on the anode electrode at a distance from the first insulating member, and a gate electrode (2) disposed on the second insulating member. Therefore, the field-emission electronic device can be formed to make the distance between the electrodes smaller than that of the known field-emission electronic device. Concretely, the distances between the cathode electrode and the gate electrode and between the cathode electrode and the anode electrode are allowed to be reduced. This results in lowering a gate voltage and an anode voltage. Further enbodiments include a field emission cathode of metallic carbide, nitride, oxide or boride in which the composition ratio of carbon, nitrogen, oxygen or boron gradually increases from the substrate side to the emitting portion in order to improve thermal expansion properties of the cathode.</p> |