| 摘要 |
PURPOSE:To provide measurability for a charged particle bean having a dia. below 0.1mum by applying to a knife edge a shield whose film thickness is controlled to the electron energy flying distance as a filter which admits selective passing of energy beam. CONSTITUTION:As an energy filter to admit selective passage of energy beam 1, a shield 6 in thin film form, whose thickness is controlled to the electron energy flying distance is applied to a knife edge 5. A Faraday cup 8 is installed downstream of this shield 6, and electrons 10 having penetrated the shield 6 are amplified by a high speed amplifier 8. The electrons 10 sensed by the Faraday cup 8 are only a beam with lesser energy turbulence, and spread of the projected beam within the shield 4 is suppressed, and influence of penetrating electrons from the shield 4 can be eliminated. This enables measuring the beam with a dia under 0.1mum.
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