| 摘要 |
PURPOSE:To accurately measure the concentration of an effective component in a resist stripper by providing a heating means for heating a sampled processing solution between a sampling means and detecting means and diluting the sulfuric acid in the processing solution by operating the change-over valve of the sampling means. CONSTITUTION:A sampling means 49 dilutes a resist stripper the quantity of which is determined by means of a determining section with pure water of an amount which is several times as much as the volume of the determining section and sends the diluted resist stripper to a heating means 53 and detecting means 54 through a path 50. The heating means 53 heats the resist stripper to such a temperature at which the concentration of an effective component can be stably measured. The detecting means 54 drops a reagent onto a fixed amount of resist stripper and measures the potential at the resist stripper. Then the means 54 calculates the concentration of the effective component from the dropped amount of the reagent by regarding the point at which the oxidation-reduction potential jumps as the end point of the reaction. |
