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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0582547(A)
申请公布日期
1993.04.02
申请号
JP19910109372
申请日期
1991.05.14
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
UEDA TETSUYA;MATSUMOTO MICHIICHI
分类号
H01L21/336;H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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