| 摘要 |
PURPOSE:To make a lowering of a scattering loss in a side surface of a waveguide by forming the ridge waveguide on a surface of the substrate composed of LiNbO3 single crystal. CONSTITUTION:The rectangular part 7 of the titled element is formed by ion- exchanging an under part of aperture of the mark 6 through the pattern mark 6 such as Al, SiO2, when the element is heat-treated in benzoic acid. And then, the mask 6 is removed and then is ion-exchanged the whole surface whereby the convex ridge waveguide 5 is formed at a part of the mark 6. The coupling efficiency of a laser ray is improved by partially increasing the thickness of the waveguide in the coupling part of the optical waveguide 5 and the semiconductor laser 9. The higher harmonics 4 is emitted in the direction of the optical waveguide by inclining an end surface of LiNbO3 single crystal in the outgoing side of the higher harmonics. The performance of the element makes stable by providing the surface protective film 11 on the upper surface of the ridge type optical waveguide 5, thereby decreasing the carrier loss. |
