METHOD AND DEVICE FOR TRANSFERRING FINE PATTERN,申请号JP19910240806-传众专利搜索

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发明名称	METHOD AND DEVICE FOR TRANSFERRING FINE PATTERN
摘要
申请公布号	JPH0582418(A)	申请公布日期	1993.04.02
申请号	JP19910240806	申请日期	1991.09.20
申请人	HITACHI LTD	发明人	TERASAWA TSUNEO;FUKUDA HIROSHI;KATAGIRI SOUICHI
分类号	G03F7/20;H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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