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发明名称
RESIST COMPOSITION CONTAINING ALKALI-SOLUBLE RESIN, 1,2-QUINONE DIAZIDE COMPOUND AND ANTI-HALATION COMPONENT
摘要
申请公布号
US5198323(A)
申请公布日期
1993.03.30
申请号
US19910694372
申请日期
1991.04.30
申请人
SUMITOMO CHEMICAL CO., LTD.
发明人
KITAO, TEIJIRO;MATSUOKA, MASARU;HANAWA, RYOTARO;UETANI, YASUNORI;TAKEYAMA, NAOKI;HIOKI, TAKESHI;TAKAGAKI, HIROSHI
分类号
G03F7/022;G03F7/09
主分类号
G03F7/022
代理机构
代理人
主权项
地址
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