| 摘要 |
PURPOSE:To efficiently recover grown mists from the vapor phase of fluorine base inert solvent for executing reflow soldering to a substrate. CONSTITUTION:At the inside of a carrying inlet 18 for substrate and at the inside of a carrying outlet 19 for substrate in a vaporizing vessel 14, a mist dropping holes 31 having large diameter and deep depth are arranged. In the inner wall of each mist dropping hole 31, a cooling coil 32 for promoting the growth of the mist particles is arranged. Suction holes in a blower 34 are connected with the lower parts of the mist dropping holes 31, and a separator 35 and a cyclone 36 are connected with a discharging port in this blower 34. The solvent mists growing the particle diameter in the vapor phase 16 are surely sucked into the mist dropping hole 51 on the way of shifting toward the carry inlet 18 for substrate and the carry outlet 19 for substrate. The solvent flowed down to the mist dropping holes 31 and the lower part of the separator 35 is once stored into a solvent tank 41 and circulated to a solvent incorporating part 43 in the vaporizing vessel 14 through a pump 42. |
