| 摘要 |
<p>PURPOSE:To increase the speed of positioning, enhance the accuracy thereof by utilizing the movable stage and driving method thereof. CONSTITUTION:In a movable stage device, the second linear motor 7 functioning as the second driving means to give thrust to a movable stage 2 is attached to the upper part, as shown in the figure, of the movable stage 2 through an attaching plate 76. The left and right ends, as shown in the figure, of the group of the second driving coils 71 are severally supported on a floor by supporting plates 81, 82. In this case, the supporting plates 81, 82 are independent of the surface plate 1, and directly support the group of the second driving coils 71 on the floor so as to have high rigidity.</p> |
