MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE

摘要

PURPOSE:To find that ROM data are written even if electrodes are not completed after a photoresist film removing process in a photolithography process for determining the ROM data. CONSTITUTION:A first photoresist film 5 which is used as a mask for ion implantation is not removed. A second photoresist film 8 is so patterned as to be left on the parts of the identification code (for instance three digits) of a ROM. Then a field insulating film 2 on a semiconductor substrate 1 is etched by using those photoresist films 5 and 8 as a mask.