VERTICAL TYPE HEAT TREATMENT EQUIPMENT,申请号JP19910232614-传众专利搜索

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发明名称	VERTICAL TYPE HEAT TREATMENT EQUIPMENT
摘要
申请公布号	JPH0574726(A)	申请公布日期	1993.03.26
申请号	JP19910232614	申请日期	1991.09.12
申请人	NEC CORP	发明人	ISHITANI SHIGERU
分类号	H01L21/31;H01L21/22	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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