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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0574950(A)
申请公布日期
1993.03.26
申请号
JP19910232112
申请日期
1991.09.12
申请人
MATSUSHITA ELECTRON CORP
发明人
TAKEBAYASHI KOUJI
分类号
H01L21/302;H01L21/3065;H01L21/31;H01L21/316;H01L21/3205;H01L21/768;H01L23/52;H01L23/522
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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