SIDEWALL SPACERS FOR CMOS CIRCUITS STRESS RELIEF/ISOLATION AND METHOD FOR MAKING,申请号EP19870100962-传众专利搜索

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发明名称	SIDEWALL SPACERS FOR CMOS CIRCUITS STRESS RELIEF/ISOLATION AND METHOD FOR MAKING
摘要
申请公布号	EP0242506(B1)	申请公布日期	1993.03.24
申请号	EP19870100962	申请日期	1987.01.23
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	DALLY, ANTHONY JOHN;OGURA, SEIKI;RISEMAN, JACOB;ROVEDO, NIVO
分类号	H01L21/76;H01L21/762	主分类号	H01L21/76
代理机构		代理人
主权项
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