INFRARED SPECTROSCOPE MEASURING DEVICE FCR SEMICONDUCTOR SUBSTRATE

摘要

PURPOSE:To speedily heat a semiconductor substrate in the infrared ray spectroscope measurement. CONSTITUTION:A heating body 26 made of carbon is installed on a ceramic plate 25 installed in a sample chamber. A wafer W as measured article is closely attached onto the heating body 26 made of carbon by the pressing force of a flat washer 40 due to the tightening of a bolt 38. Each opened port 27 for allowing the passing of the infrared ray radiated on the wafer W is formed at the center parts of the heating body 26 made of carbon and the ceramic plate 25, and the transmission light of the wafer W is detected and spectroscope measured.