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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH0570941(A)
申请公布日期
1993.03.23
申请号
JP19910238444
申请日期
1991.09.19
申请人
SHIMADZU CORP
发明人
ISHIDA SHINICHIRO
分类号
C23C14/34;C23C14/56
主分类号
C23C14/34
代理机构
代理人
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地址
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