发明名称 APPARATUS FOR LOADING AN UNLOADING FLAT ARTICLES WITH RESPECT TO A STORAGE CASSETTE
摘要 An apparatus is provided for placing and removing flat wafers such as those used in integrated circuits in a cassette. The apparatus includes a track having a mobile part at one end thereof. The track may be horizontally inserted under one of the flat articles and the mobile part raised to contact and raise the respective article. In this way, the track can be removed from the cassette retaining the article. After the article has been appropriately processed, it can be reinserted into the cassette by moving the track back into the cassette and lowering the mobile part thereof. The flat article will then be retained on lateral supports in the cassette.
申请公布号 US5195862(A) 申请公布日期 1993.03.23
申请号 US19900634416 申请日期 1990.12.27
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 CRUZ, DIDIER
分类号 B65H1/28;B65G1/00;B65G1/04;B65G1/07;B65G49/07;H01L21/677;H01L21/683 主分类号 B65H1/28
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