INSPECTION OF DEFECT OF STAMPER,申请号JP19910230008-传众专利搜索

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发明名称	INSPECTION OF DEFECT OF STAMPER
摘要
申请公布号	JPH0572143(A)	申请公布日期	1993.03.23
申请号	JP19910230008	申请日期	1991.09.10
申请人	NIKON CORP	发明人	KURITA SHINICHI
分类号	G01N21/88;G01N21/95;G11B7/26	主分类号	G01N21/88
代理机构		代理人
主权项
地址

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