发明名称 Replaceable fluid dispensing nozzle
摘要 A nozzle assembly for use in a semiconductor fabrication liquid dispensing apparatus which dispenses a liquid onto a surface. The nozzle assembly comprises a bulkhead comprised of a non-stick material (such as Teflon TM or similar material) coupled at a first end to a dispensing tube. The nozzle is removable and reusable so that an inventory of replaceable nozzles may be kept on hand for optimum operation of a liquid dispensing apparatus.
申请公布号 US5196064(A) 申请公布日期 1993.03.23
申请号 US19910811167 申请日期 1991.12.19
申请人 INTEL CORPORATION 发明人 BRANDERHORST, EVERETT J.;GONZALES, JOSE Y.
分类号 B05B15/08 主分类号 B05B15/08
代理机构 代理人
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