发明名称 |
Replaceable fluid dispensing nozzle |
摘要 |
A nozzle assembly for use in a semiconductor fabrication liquid dispensing apparatus which dispenses a liquid onto a surface. The nozzle assembly comprises a bulkhead comprised of a non-stick material (such as Teflon TM or similar material) coupled at a first end to a dispensing tube. The nozzle is removable and reusable so that an inventory of replaceable nozzles may be kept on hand for optimum operation of a liquid dispensing apparatus.
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申请公布号 |
US5196064(A) |
申请公布日期 |
1993.03.23 |
申请号 |
US19910811167 |
申请日期 |
1991.12.19 |
申请人 |
INTEL CORPORATION |
发明人 |
BRANDERHORST, EVERETT J.;GONZALES, JOSE Y. |
分类号 |
B05B15/08 |
主分类号 |
B05B15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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