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经营范围
发明名称
PRODUCTION OF THIN FILM
摘要
申请公布号
JPH0570935(A)
申请公布日期
1993.03.23
申请号
JP19910236064
申请日期
1991.09.17
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
IIJIMA KENJI;HAYASHI SHIGENORI;HIRAO TAKASHI
分类号
C23C14/06;C23C14/28;C23C14/32
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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