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发明名称
RESIST DEVELOPER AND PATTERN FORMING METHOD
摘要
申请公布号
JPH0566570(A)
申请公布日期
1993.03.19
申请号
JP19910227073
申请日期
1991.09.06
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
MIYOSHI KAZUNARI;DEGUCHI KIMIKICHI;ISHII TETSUYOSHI;MATSUDA KOREHITO
分类号
G03F7/32;H01L21/027;H01L21/30
主分类号
G03F7/32
代理机构
代理人
主权项
地址
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