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发明名称
CHEMICAL VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH0567574(A)
申请公布日期
1993.03.19
申请号
JP19910227630
申请日期
1991.09.09
申请人
FUJITSU LTD
发明人
ISHITA MASAJI
分类号
H01L21/205;H01L21/285;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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