发明名称 MEASURING METHOD FOR THERMAL PROPERTY VALUE OR THICKNESS OF FILM
摘要 PURPOSE:To reduce the range of errors to enhance the accuracy of measurements by providing two samples the sample films of which are made of the same material and different in thickness and the substrates of which are made of the same material and equal in thickness, and finding the phase difference between light applied to the two samples and generated sounds as to the two samples. CONSTITUTION:Two samples have respective sample films 3, 3 on substrates 4, 4 and the films 3, 3 are made of the same material and different in thickness. The substrates 4, 4, are made of the same material and equal in thickness. The two samples are disposed within a sealed container 5 having a light transmitting window 2 and light 1 is intermittently applied to the films 3 via the window 2 and sounds generated are measured using a microphone and thereby the phase difference between the applied light 1 and the generated sounds is found as to the two samples. The thermal property values or thicknesses of the sample films 3, 3 are found according to the difference in the phase difference between the two samples and to a relational expression among the thermal property values, specific gravity and thicknesses of the films 3, 3 and the substrates 4, 4, and the difference in the phase difference.
申请公布号 JPH0566195(A) 申请公布日期 1993.03.19
申请号 JP19910227359 申请日期 1991.09.06
申请人 KOBELCO KAKEN:KK 发明人 NAGAOKA YUTAKA
分类号 G01B11/06;C09J7/04;G01B17/02;G01B21/08;G01N21/00;G01N29/00 主分类号 G01B11/06
代理机构 代理人
主权项
地址