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发明名称
DIELEKTRISCH ISOLIERTES INTEGRIERTES HALBLEITERBAUELEMENT UND HERSTELLUNGSVERFAHREN.
摘要
申请公布号
DE3686310(T2)
申请公布日期
1993.03.18
申请号
DE19863686310T
申请日期
1986.10.23
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
SILVESTRI, VICTOR JOSEPH, HOPEWELL JUNCTION NEW YORK 12533, US;TSANG, PAUL JAMIN, POUGHKEEPSIE NEW YORK 12603, US
分类号
H01L27/082;H01L21/331;H01L21/76;H01L21/762;H01L21/8228;H01L21/8234;H01L21/8238;H01L27/08;H01L27/088;H01L27/092;H01L29/73;(IPC1-7):H01L21/76
主分类号
H01L27/082
代理机构
代理人
主权项
地址
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