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发明名称
FORMATION OF THIN FILM
摘要
申请公布号
JPH0559559(A)
申请公布日期
1993.03.09
申请号
JP19910222728
申请日期
1991.09.03
申请人
SUMITOMO ELECTRIC IND LTD
发明人
NAKAISHI HIROYUKI
分类号
C23C16/18;C23C16/48;H01L21/205;H01L21/28;H01L21/285
主分类号
C23C16/18
代理机构
代理人
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地址
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