发明名称 SEMICONDUCTOR STORAGE
摘要 PURPOSE:To operate a semiconductor storage at a high speed, by providing a memory cell reduced in its size, wherein the transfer gate of a MOS-type SRAM cell is formed on a polysilicon layer, and by forming a word line and the gates of the transistors other than the memory cell on an identical layer, and by making the layer thereof into a low resistance wiring. CONSTITUTION:The source and drain of a transfer transistor T4 are formed on the polysilicon extending from a gate 3 of a driver transistor T1, and on this poly silicon a word line 7 having a polycide structure is formed. A gate electrode 14 of a transistor other than a memory cell is formed on the same layer as the word line 7, and the gate electrode 14 of the transistor of a peripheral circuit is made to have the polycide structure too, and therefore, its resistance is made low.
申请公布号 JPH0555524(A) 申请公布日期 1993.03.05
申请号 JP19910215694 申请日期 1991.08.28
申请人 NEC CORP 发明人 SHIMIZU TOSHIYUKI
分类号 G11C11/412;H01L21/8244;H01L27/11 主分类号 G11C11/412
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