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发明名称
SOI SEMICONDUCTOR SUBSTRATE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH0555359(A)
申请公布日期
1993.03.05
申请号
JP19910218982
申请日期
1991.08.29
申请人
FUJITSU LTD
发明人
TAKAOKA MATSUO
分类号
H01L21/02;H01L21/20;H01L21/205;H01L21/76;H01L21/762;H01L27/12
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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