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发明名称
VERFAHREN UND HERSTELLUNG ZUR HERSTELLUNG EINES SILIZIUMOXIDFILMS
摘要
申请公布号
DE4229161(A1)
申请公布日期
1993.03.04
申请号
DE19924229161
申请日期
1992.09.01
申请人
FUJI ELECTRIC CO., LTD., KAWASAKI, KANAGAWA, JP
发明人
SHIMIZU, AKIO;TSUJI, NAOTO, KAWASAKI, KANAGAWA, JP
分类号
C23C16/50;C23C16/40;C23C16/511;C23C16/517;H01J37/32;H01L21/205;H01L21/31;H01L21/316;H05H1/16
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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