Arraying process of ultra-small objects and fabrication process of ultra-fine structure by using the arraying process.

摘要

A substrate is immersed in an aqueous solution of aminopropyltriethoxysilane to bind amino groups on the substrate. Certain amino groups are selectively eliminated by an electron beam so that an array pattern of amino groups is obtained. The substrate with the array pattern formed thereon is then immersed in a bicarbonate buffer in which biotin is contained, whereby biotin molecules are coupled to the amino groups in the form of the array pattern. The resulting substrate is immersed in an avidin-containing bicarbonate buffer. On the side, biotin is added to a suspension of liposome with alamethicin incorporated therein, whereby a biotin molecule is coupled to the amino group of each alamethicin molecule to obtain a suspension of biotinylated proteoliposome. In this suspension, the avidin-bound substrate is immersed. Biotinylated proteoliposome particles are immobilized firmly at a high density on the substrate via the respective avidine molecules.