发明名称 Bonding head assembly
摘要 A bonding head assembly including a retaining block having a vacuum suction hole or electromagnet on its concave surface formed on the undersurface, a central shaft loosely passing through the central hole of the retaining block and having a bonding tool at the lower end, an oscillating ball attached to the upper part of the central shaft. After the bonding tool is brought into in contact with a workpiece, vacuum suction or electromagnet is activated so that the oscillating ball is brought into a tight contact with the concave surface of the retaining block, thus securely retaining the oscillating ball in the retaining block and, as a result, setting the position of the central shaft and therefore the bonding tool.
申请公布号 US5190205(A) 申请公布日期 1993.03.02
申请号 US19910785494 申请日期 1991.10.31
申请人 KABUSHIKI KAISHA SHINKAWA 发明人 OZAWA, KANJI;SONODA, YUKITAKA
分类号 H01L21/60;B23K20/02 主分类号 H01L21/60
代理机构 代理人
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