| 摘要 |
PURPOSE:To obtain an opto-acoustic spectral analyzer whose detection frequency is high, which can be used in vacuum and whose detection efficiency is high. CONSTITUTION:An opto-acoustic detecting means 100 comprising a substrate 101 with a diaphragm 102 formed and a detecting part 103 provided on the diaphragm for converting transformation of the diaphragm to an electric signal is used as an opto-acoustic detecting means, wherein energy application is performed with a sample 1 brought into contact on the diaphragm equipped with the detecting part. Exciting energy to be applied to the sample is not limited to light (visible light) but ultraviolet light, X-rays, radioactive rays or electron beams and other particle rays can be utilized. |
