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发明名称
DUST COLLECTING APPARATUS
摘要
申请公布号
JPH0552716(A)
申请公布日期
1993.03.02
申请号
JP19910215315
申请日期
1991.08.27
申请人
MITSUBISHI ELECTRIC CORP
发明人
TANAKA HIROSHI
分类号
B01D29/01;G01N1/02;G01N15/00;H01J37/20;H01L21/02
主分类号
B01D29/01
代理机构
代理人
主权项
地址
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