摘要 |
PURPOSE:To enhance measuring accuracy in measuring the concn. of gas by utilizing a pyroelectric type infrared sensor. CONSTITUTION:The infrared rays from an infrared generating source 2 are allowed to be incident to a pyroelectric type infrared sensor 3 through a gas cell 1 having gas to be measured received therein. The pressure in the gas cell 1 is set to pressure higher than 1atm. to perform measurement. By setting the pressure in the gas cell 1 to high pressure, the apparent concn. of gas becomes high and measuring sensitivity is enhanced. |