发明名称 Semiconductor device and method of production
摘要 A novel semiconductor device and method of production of such a device are provided. Both the N and P channels of the novel semiconductor device are formed by contact self-alignment, thereby permitting high speed operation and high density integration to be realized. The formation of the channels by contact self-alignment is accomplished by depositing a P type polysilicon layer on an N well region and an N type polysilicon layer on a P well region. A silicide layer is formed over both the P and N type polysilicon layers to form a polycide.
申请公布号 US5190886(A) 申请公布日期 1993.03.02
申请号 US19920916800 申请日期 1992.07.17
申请人 SEIKO EPSON CORPORATION 发明人 ASAHINA, MICHIO
分类号 H01L21/60;H01L21/8238;H01L27/092 主分类号 H01L21/60
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