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经营范围
发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
JPH0547846(A)
申请公布日期
1993.02.26
申请号
JP19910207810
申请日期
1991.08.20
申请人
HITACHI LTD
发明人
TAKEI AKI;CHIBA KATSUAKI;HANEDA MAKOTO
分类号
H01L21/60;H05K3/34
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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