| 摘要 |
PURPOSE:To enable an amorphous silicon solar battery having an intrinsic a-Si layer to have a performance equivalent to that of amorphous silicon solar batteries having no intrinsic a-Si layer without increasing the contact resistance between the intrinsic a-Si layer and a rear surface electrode layer by forming the intrinsic a-Si layer on an n-layer and diffusing the rear surface electrode in the intrinsic a-Si layer. CONSTITUTION:An amorphous silicon (a-Si) solar battery element is constituted of a transparent electrode layer 2, p-layer 31, i-layer 32, and n-layer 33 which are successivel.y formed on the layer 2 and respectively composed of a-Si films, and rear surface electrode layer 4 which is formed so that the layer 4 can be diffused in an intrinsic a-Si layer 34 formed on the layer 33. Especially, the a-Si layer 34 is provided and, at the same time, the electrode layer 4 is diffused in the layer 34. Therefore, the contact resistance between the layers 3 and 4 does not increase and a performance which is equivalent to that of amorphous silicon solar batteries having no intrinsic a-Si layer 34 can be obtained. |
